Output Disturbance Observer Structure Applied to Run-to-Run Control for Semiconductor Manufacturing

Run-to-Run Control in Semiconductor Manufacturing

Nonlinear Run-to-Run Controller for Semiconductor Manufacturing

Run-to-run control is a generic methodology in control of semiconductor manufacturing processes. It is a model based process control strategy whereby process inputs (recipes) are adjusted on a run-to-run basis in response to measurements (responses) of process state variables. It updates the recipes of the process at the beginning of each run. In semiconductor manufacturing, many processes are ...

DHOBE Run-To-Run Controller for Semiconductor Manufacturing

Future Work The development of VLSI raised the requirement of process control for semiconductor manufacturing. On the other hand, the knowledge of different processes is very limited. Run-by-Run control is an effective way to regulate the process response under different kinds of disturbances such as small drifting, abrupt shifting, bad-data and model errors. There are several popular methods f...

A batch-based run-to-run process control scheme for semiconductor manufacturing

Run-to-Run (R2R) control has been widely used in semiconductor manufacturing to compensate for process disturbance and to improve quality. The traditional R2R controller only takes the process output in a previous run as its input and generates an optimal recipe for the next run. In a multistage semiconductor manufacturing process, variations in upstream stations are propagated to downstream st...

A run-to-run control framework for VLSI manufacturing

A run-to-run (R2R) control framework has been developed for application to supervisory control of semiconductor manufacturing processes. This generic framework, which is being developed for eventual transfer to industry, is one component of a multi-level control system that includes real-time equipment and process control as well as pseudo-real-time process control elements operating in conjunc...